9322728 Kurtz This Small Businss Innovation Research (SBIR) Phase II project is development of a portable on-line X-ray diffraction system for in-situ measurement of microstructural material properties useful in the control of many industrial fabrication porcesses. Phase I succcessfully demonstrated the system for real-time analysis of sputter-deposited platinum films. The fiber-optic based device uses a position-sensitive scintillation detector (PSSD). In Phase I it was modified for use on a vapor depostion chamber for simultaneous measurement of critical film parameters. In Phase II detector system capabilities will be upgraded to provide simultaneous multiple peak monitoring on large commercial vapor deposition reactors. The new X-ray diffraction system is expected to contribute greater yields and higher through put in semiconductor and other advanced materials production operations.
