9361318 McNeill A high power density (greater than 1,000 W/cc) microwave-driven plasma source has been developed, and it can potentially be an efficient vacuum ultra violet (VUV) light source. This assessment is based upon previous spectroscopic measurements and power balance analysis of steam plasmas created at atmospheric pressure with only 6 kW of power. We propose to a new UV light source with high power below 200 nm. This class of light source can be potentially applied to photolithography and surface treatment of polymers.
